Development of UHVTEM with UHV compatible goniometer and specimen-treatment chamber for surface studies

Abstract

JEOL has previously been involved in the development of various ultrahigh vacuum transmission electron microscopes (UHVTEM). Interest in UHVTEM is increasing, and for higher vacuum, higher resolution and specimen treatment capability, we have developed a new type of UHVTEM, the JEM- 2000FXVII. This paper reports the construction and performance of this new UHVTEM including a newly developed UHV compatible goniometer, specimen treatment chamber and various types of specimen heating holders.Figure 1 shows the overview of the JEM-2000FXVII with a specimen pre-treatment chamber (PTC) and UHV compatible goniometer. The PTC consists of two chambers: one for specimen treatment and the other for pre-evacuation. Specimen treatment is accomplished by using any of 7 attachment ports (six 70ϕ ICFs and a 152ϕ ICFs) in the PTC (Fig. 2). The PTC is attached directly to the TEM column and quick exchange of the specimen from PTC to column is thus possible. In-situ observation is also possible using the three attachment ports (70ϕ ICFs) in the column.