Abstract
We have designed and fabricated three-dimensional (3D) stages driven by electrostatic comb actuators. The stage consists of traveling tables, suspensions, and comb actuator(s). The key to realizing 3D motions is in the geometry of the suspensions, which incorporate a pair of leaf springs inclined to the substrate. First, the motions of the stage were analyzed by finite element method (FEM). Then 3D electrostatic stages were fabricated on an silicon on insulator (SOI) wafer. Finally, after examining the relation between the vertical and lateral displacements and driving voltage, surface topography was observed by using an atomic force microscope (AFM) that was equipped with the 3D electrostatic stages as the scanner.
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