Development of three-dimensional profiler for large field micro-surface topography measurement

Abstract

This paper presents a large field phase-shifting interference microscope for micro-surface topography measurement. A PZT is used as the Z-directional phase shifter. The interference microscope is the combination of the infinity tube microscope with the Mirau two-beam interferometer. Two-dimensional precision motorized stage is aligned as the scanning system in the X- and Y-direction to extend the test surface measurement range to 12.5 mm × 12.5 mm. The minimum displacement is 0.039 m and the overlapped proportion is 0.22. A fast stitching algorithm is proposed based on grid matching. According to the reflectivity of the core and the ferrule, the plate with the transmission/reflectivity ratio of 70/30 is selected to balance the interference intensity. The instrument is proved to be valid by actual measurement of the end surface of an optical fiber connector.