Abstract

We have designed and fabricated silicon photostrip sensors with polysilicon resistors and coupling capacitors. This developed detector consists of two photo-strip sensors sandwiching opposite faces of a crystal scintillator and being oriented orthogonal to each other. This configuration is able to provides the 2 dimensional position information and to measure the energy. Therefore they can be used in nuclear and medical application. The developed sensor has p <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> strip array for signal readout. On the other hand, the rear side is a light entrance window which has very thin n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> doping layer with anti-reflective coating to prevent light losing. These sensors are fabricated on a 5-in., 380 ¿m-thickness, n-type, high resistivity silicon wafer. The leakage currents of the fabricated sensors are measured as a function of the reverse bias voltages. The light responses of fabricated silicon photosensors coupled with a CsI(Tl) crystal are measured by using <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">241</sup> Am, <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">22</sup> Na and <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">137</sup> Cs radioactive sources. The energy resolutions of the photodiode coupled with the crystal are obtained to be 20.5 % and 13.8 % for the <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">22</sup> Na (511 keV) and the <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">137</sup> Cs (662 keV) ¿-rays. The one-dimensional position information by the ¿ particles ( <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">241</sup> Am) are clearly observed by the photo-strip sensor coupled with the crystal.

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