Development of the device prototype based on the semiconductor–carbon nanotubes structure for optical radiation detection and study of its parameters

Abstract

A light-receiving device prototype based on the semiconductor–carbon nanotubes (CNTs) structure consisting of 16 cellular structured sensitive elements grown on the same substrate is developed. The topology of sensitive cells represents holes through metallization and insulator layers to the semiconductor from which the CNT array grows to the top metallization layer. The device prototype parameters are determined as follows: the effective wavelength range is within 400–1100 nm, the operational speed is no longer than 30 μs, the coefficients of peak sensitivity reached at wavelengths of 640 and 950 nm are 197 and 193 μA/W, respectively.