Development of the control strategy of a 2D nanopositioning long-range stage

Abstract

In order to provide an effective positioning along a wide working range with nanometre resolution, a two-dimensional stage platform has been designed and manufactured. In view of the demanding metrological performance, the drive system and control strategy are being analysed and developed. Thus, this paper describes the preliminary modelling of the control when using four custom-made Halbach linear motors as a driving system. Firstly, the 1D control case is defined and validated by simulation. The different required blocks of the loop are presented and an initial controller solution is proposed to achieve the established positioning features. Secondly, the 2D scheme is presented to define all the needs of the whole control, including all sensors and actuators of the system. In addition, this work justifies the hardware and software selected, as an optimal low-cost solution for the developed long-range stage prototype.