Abstract
Operation of objects in 3-dimensional space can be expressed in terms of acceleration and angular velocity. Sensors to detect them are made by using micro-machining technology and ceramic technology. In the field of acceleration sensors, 3-axis acceleration sensors that detect acceleration in 3-dimensional space have already been marketed, and in the field of angular velocity sensors, piezoelectric 2-axis angular velocity sensors have been developed. By applying such piezoelectric 2-axis angular velocity sensors, 3-axis angular velocity can be detected with the vibrator's velocity components in the directions of two axes, and the detection components of Coriolis force produced by angular velocity in the directions of two axes. By using this principle, we have succeeded in developing a 3-axis angular velocity sensor that detects 3-axis angular velocity with one detecting element. This report details the construction, detection principle, and detection circuit of the sensor, as well as the performance, including sensitivity, cross-axis sensitivity, and linearity.
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