Abstract
In this paper, recent progress in the improvement of TEM techniques based on a 40-120 kV high resolution analytical TEM and some application to the catalysts are discussed. The spherical aberration coefficient and TEM image resolution of high resolution objective lens at the accelerating voltage of 120 kV are 1.1 mm and 0.2 nm respectively. The high resolution objective lens pole-piece has been newly designed to accommodate a high solid angle silicon drift detector of an energy dispersive X-ray analyzer. A FIB fabricated apertures with the smallest diameter of 1m are equipped as the field limiting aperture for structural analysis of individual nanometer sized crystalline. The external view of the microscope
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