Abstract
For the measurement of ultra smooth surface topography, a surface image scanning device measurement head mechanism based on the principle of atomic force microscope (AFM) was designed. It uses coarse adjustment, semi-delicate adjustment, delicate adjustment triple-stage adjustment mechanism, and tests the atomic force between the sample and the probe by using laser generator, position sensitive detector (PSD), cantilever and probe. This mechanism has high setting accuracy and resetting accuracy, combined with two-dimension movable table, can scan the surface topography of samples.
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