Abstract
An energy-dispersive detector of extreme ultraviolet (EUV) photons that uses superconducting tunnel junctions (STJs) is being developed. The performance of the STJs for detecting EUV photons was evaluated at a synchrotron radiation facility. An energy resolution of 17.8±0.6 eV in FWHM (including external noise of 17.6±0.2 eV) for 55 eV EUV photons was obtained with a 100×100 μm2 STJ.
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