Abstract
Abstract We present our recent development of superconducting detectors for measurements of cosmic microwave background. We have fabricated antenna-coupled superconducting tunnel junctions (STJs). Two different types of STJs have been fabricated: the parallel-connected twin junction and the microstrip. Both types of STJs made of Nb and Al have successfully detected 80 GHz millimeter wave radiation with photon-assisted tunneling. We have also developed microwave kinetic inductance detectors (MKIDs). The MKIDs offer us high multiplexing factors with a single readout line using the frequency-domain readout. We have developed abosrption-type and transmission-type MKIDs whose resonators are formed with either coplanar waveguides (CPW) or microstrips. The quality factor of the CPW MKID made of Nb is measured to be about 10 5 . The microstrip MKID is being developed for the multichroic measurements.
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