Abstract
Submicrometer Laser Induced Periodic Surface Structures (LIPSS) were generated on polyethylene-terephthalate (PET) using polarized beam of an ArF excimer laser, having a fluence of 4 mJ/cm 2 . Atomic Force Microscope and a home made repositionable sample holder was used to follow the morphological changes on the same part of the surface shot by shot. The main phases of the structure formation process were described: light scattering on the granulates which exist also on the original PET surface; appearance of additional granules and formation of elliptical modulation around the granules; transformation into ripple-shape modulation. The dependence of the LIPSS period on the wavelength and on the angle of incidence was determined. The LIPSS generating feedback mechanism was described as the interference between the incoming and surface-scattered waves in the light modified region. It was shown that the LIPSS is a self-organized grating.
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