Abstract
The trend towards minimization in ultralarge-scale integration (ULSI) fabrication requires an increasingly precise motion accuracy for an XY-stage in a high-vacuum environment of electron beam (e-beam) systems. Aerostatic bearings allow for an extremely smooth motion, because the slider of the XY-stage is supported by an air film under a noncontact condition. However, such an XY-stage in aerostatic bearings is not easily introduced into the e-beam systems because of the markedly high amount of exhaust gas leaking into a vacuum chamber. In this paper, we describe a newly developed hybrid XY-stage guided by aerostatic bearings equipped with a noncontact seal mechanism for scanning motion and by mechanical rolling guides for stepping motion.
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