Abstract
Since a replication-type of the Wolter mirror is obtained as the negative shape of its mandrel via shape replication represented by electroforming, a high precision mandrel fabrication process is essential for nano-focusing with the mirror at synchrotron radiation facilities. In particular, three-dimensional shape measurement technique for the mandrel is required. In this study, we developed the high precision three-dimensional shape measurement system dedicated for the Wolter mandrels. First, the shape error distributions of the ellipsoidal surface and the hyperboloid surface were measured independently. The geometrical relation between the surfaces was constrained by the longitudinal profiles which include the intersection measured by a profilometer. The diameter was also measured and finally the three-dimensional shape distribution was obtained. Applying this system, we fabricated a high precision Wolter mandrel.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
