Abstract
A scanning X-ray fluorescence microscope that uses a Kirkpatrick-Baez (KB) mirror and white synchrotron radiation (SR) was developed for obtaining detailed elemental maps within a micro-meter order. The KB mirror is a total reflection mirror, and the white X-rays are focused at a focus point without chromatic aberration. Therefore, the proposed microscope can use strong white and/or pink SR and enable elemental mapping within a practical measurement time at small synchrotron facilities. A feasibility study on the developed microscope was performed by using white SR at the SAGA Light Source in Tosu, Japan. By using the developed microscope, an X-ray microbeam 1 μm in diameter was successfully formed, and a fine elemental map of a Cu mesh and a seed of eustoma were obtained.
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