Abstract
In small and medium-sized display for mobile devices such as smartphones, organic EL displays using organic light-emitting diodes (OLED) are increasing. Therefore vacuum evaporation and plasma enhanced chemical vapor deposition (PECVD) equipment are key technologies in manufacturing of OLED devices. We developed new process gas monitor for PECVD process which meet customer's new demand. It was confirmed that the lifetime of the ion source is longer than conventional one.
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