Abstract
We present radio-frequency (RF) heating-assisted nanoimprint lithography (NIL) for the rapid fabrication of nanostructured biochips. The chips were spin-coated using a RF-sensitive polymer film, namely polyethylene terephthalate glycol-modified (PETG). The RF heating process takes advantage of rapid temperature increases and cooling for NIL. Using a patterned nickel film as the mold, various nanostructures, such as nanowire, nanorod, and nanogrid arrays, were successfully fabricated within several seconds. For surface plasmon biosensing chips, the silver-coated nanowire arrays achieved a linewidth of 6.01 nm and wavelength sensitivity of 550 nm per refractive index unit. The functionality of the sensor was verified by observing the label-free antigen–antibody interactions.
Highlights
Surface plasmon resonance (SPR) sensing is a real-time label-free detection technique that has been applied to medical diagnostics, environmental monitoring, and food-safety verification.[1,2,3] SPR is a collective oscillation of electrons on metallic surface with the optical frequency
The localized surface plasmon is coupled to Bloch Wave-surface plasmon polariton (BW-SPP)[12] on the periodic metallic surface
Using a polyethylene terephthalate glycol-modified (PETG) solution as the coating material, we demonstrated that nanostructures can be quickly produced on glass and plastic substrates using the RF welding machine
Summary
Surface plasmon resonance (SPR) sensing is a real-time label-free detection technique that has been applied to medical diagnostics, environmental monitoring, and food-safety verification.[1,2,3] SPR is a collective oscillation of electrons on metallic surface with the optical frequency. Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors We present a simple and rapid NIL method for fabricating high-quality nanostructured SPR chips.
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