Development of Pt/MgO(100) Buffer Layers for Orientation Control of Perovskite Oxide Thin Films

Abstract

(100)-oriented MgO thin films can be effectively grown at a substrate temperature of room temperature (RT) on Fe seed layers by the facing-targets sputtering (FTS) method. Pt(100) orientation was observed when the Pt layer was deposited on MgO(100)/Fe buffer layers at a substrate temperature above 350 °C. Pt thin films can be grown effectively with (100) orientation and with smaller strain when they are prepared at a substrate temperature above 500 °C. Also, Ba1-xSrxTiO3 (BST) thin films with (100) preferential orientation can be grown on Pt(100)/MgO(100)/Fe buffer layers when Pt and BST films are deposited at a substrate temperature of 500 °C. Pt(100)/MgO(100)/Fe buffer layers are very effective for attaining BST(100) orientation.