Development of precision blank carriage for manufacturing large gratings and echelles

Xinfang Ge,Biao Chu

doi:10.1177/1687814018819547

Abstract

A long-travel positioning device, which combines a ball-screw-driven coarse stage with a fine one, driven by piezoelectric translator, to achieve the long-distance traveling, up to 500 mm, as well as high-precision positioning, is crucial in the field of diffraction grating fabrication at nanometer scale. In this article, we present the design of the fine-feed drive stage with resolution as high as 20 nm and propose a single neuron-based proportional–integral–derivative controller to realize ultra-precision positioning. A high-performance piezoelectric translator is used to drive the mechanism, and the parallel leaf springs are used to guide the moving platform with preload force. A dynamic model of the precision positioning mechanism has been established by considering the Hertzian contact. In addition, the static and dynamic properties are investigated with the laser interferometry tracking methodology. The experimental results indicate that the positioning accuracy of less than 10 nm is obtained with the single neuron-based proportional–integral–derivative controller and also demonstrate the excellent performance of the proposed mechanism and control strategy.

Highlights

Ultra-precision positioning techniques have become one of the most important features of an ultraprecision machine.[1,2] They are widely used in various industrial applications, for example, machine processes, computer components, scanning probe microscope, biotechnology, integrated circuit manufacturing, optical docking, and robotics, especially in the area of diffraction grating manufacturing.[3,4] The demand for gratings with a larger ruled area and higher groove density has increased remarkably because of the rapid development of synchrotron radiation and space astronomy, and the requirement for high-quality spectrometers.[5]
A piezoelectric-driven positioning mechanism with parallel flexure hinge has been presented in detail for the diffraction grating ruling engine
finite element analysis (FEA) is performed to the design procedure

Summary

Introduction

Ultra-precision positioning techniques have become one of the most important features of an ultraprecision machine.[1,2] They are widely used in various industrial applications, for example, machine processes, computer components, scanning probe microscope, biotechnology, integrated circuit manufacturing, optical docking, and robotics, especially in the area of diffraction grating manufacturing.[3,4] The demand for gratings with a larger ruled area and higher groove density has increased remarkably because of the rapid development of synchrotron radiation and space astronomy, and the requirement for high-quality spectrometers.[5]. Keywords Nano-precision feeding, piezoelectric translator, leaf spring, dynamic performance, large gratings For a diffraction grating ruling engine, better system stability, rapid dynamic response, long motion stroke, and high-precision positioning are required.

Results

Conclusion