Abstract
The fundamental study of digital image processing, in relation to the scanning electron microscopy seems to have provisionally been completed. Since the SEM image is essentially of electric signal, the on-line digital image processing system linked to the SEM should find unique applications different from the simple digital image processing. This paper describes several useful techniques applied. to the practical on-line processing. Techniques of interpolation, signal averaging, Laplacian filter, smoothing by averaging along edges, homomorphic filter, etc. have been used to reduce the unfavorable effects in SEM images. From our experimental results, we have confirmed a potential ability of on-line digital image processing system, which has not yet been established.
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