Abstract
AbstractIf we consider the MEMS market value breakdown, more than 4 % of the share goes to RF MEMS devices. With ever-increasing demand for optical and wireless communication, RF MEMS devices have a huge market in the coming years. Of the all RF MEMS devices, MEMS switches form the most important building block. With all the 32 types of MEMS switch configurations present, only switches with electrostatic and piezoelectric actuation are the most mature and present in the commercial market. This chapter focuses on design, simulation, optimization, and fabrication of MEMS switches. The chapter discusses two types of electrostatic switches, low process temperature, low stress electrostatic RF MEMS switch and all metal RF MEMS switches and one type of piezoelectric RF MEMS switch.KeywordsPiezoelectric switchElectrostatic switchLow process temperatureSurface micromachiningDesign optimizationPZTSiN
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