Abstract
Compliant bridge mechanisms are frequently utilized to scale micrometer order motions of piezoelectric actuators to levels suitable for desired applications. Analytical equations have previously been specifically developed for two configurations of bridge mechanisms: parallel and rhombic type. Based on elastic beam theory, a kinematic analysis of compliant bridge mechanisms in general configurations is presented. General equations of input displacement, output displacement, displacement amplification, input stiffness, output stiffness and stress are presented. Using the established equations, a piezo-driven compliant bridge mechanism has been optimized to maximize displacement amplification. The presented equations were verified using both computational finite element analysis and through experimentation. Finally, comparison with previous studies further validates the versatility and accuracy of the proposed models. The formulations of the new analytical method are simplified and efficient, which help to achieve sufficient estimation and optimization of compliant bridge mechanisms for nano-positioning systems.
Highlights
In recent decades, piezoelectric actuators (PZTs) have been frequently used in micro/nanoapplications including advanced manufacturing, high precision positioning, scanning probe microscopes and biological cell manipulation [1,2,3,4]
Methods based on elastic beam theory and motion analyses have been used, where linear models incorporating beam theory of the flexure hinge for frequencies large analytical equations of displacement amplification and stiffness are high obtained
The aim in this paper is to investigate a simplified analytical model to be employed within the optimization of displacement amplification for compliant bridge mechanisms covering all types of
Summary
Piezoelectric actuators (PZTs) have been frequently used in micro/nanoapplications including advanced manufacturing, high precision positioning, scanning probe microscopes and biological cell manipulation [1,2,3,4]. Methods based on elastic beam theory and motion analyses have been used, where linear models incorporating beam theory of the flexure hinge for frequencies large analytical equations of displacement amplification and stiffness are high obtained [20]. Of thethe a given application, the optimal design may occur in any of the aforementioned configurations, and orientation of the flexure hinge has a significant influence on the mechanism’s performance [29]. A method basedanalytical on beam theory analysis optimization of displacement amplification for compliant bridge mechanisms covering all types of optimization of displacement amplification for compliant bridge mechanisms covering all detailed, and analytical equations of input, output, displacement amplification, stiffness and types stress of configuration. The presented models and optimizations and verified by FEA and experimental theoretic displacement amplification ratio formula ofare aligned-type compliant bridge mechanisms tests. Comparisons of the established models with previous models are carried out, and a theoretic theoretic displacement amplification ratio formula of aligned-type compliant bridge mechanisms is displacement attained. amplification ratio formula of aligned-type compliant bridge mechanisms is attained
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