Development of Pattern Transfer Process onto Cylindrical Surface and Its Application for Fabrication of High Performance Stent.

Abstract

We have developed pattern transfer process transferring a micro pattern of a planer mask onto a cylindrical surface of a tube-like structure. For this process, a rolling exposure system was constructed by modifying the conventional exposure system for IC fabrication process. The deposition process of thin photoresist on the cylindrical surface by using electrophoretic resist was also developed. The 20 μm line and space pattern could be transferred on the cylindrical surface of the 3 mm in diameter glass tube. The medical applications of this process are also described. A stent, one of the medical implements, has the tube-like 3 D structures. The process developed was used to fabricate the high performance stent. The complicated stent pattern was transferred on the cylindrical surface of a 5 mm in diameter Titanium tube, and the tube was etched through by using the pattern as a mask. This process was key technology to fabricate the high performance medical implements/instruments for minimally invasive treatment.