Abstract

Development of Organic Gas Sensor Using Quartz Crystal Microbalance Coated with Plasma-polymerized Films

Highlights

  • IntroductionIn industry and research facilities, many organic solvents are used in manufacturing processes and experiments.[1]

  • In industry and research facilities, many organic solvents are used in manufacturing processes and experiments.[1]. These organic solvents are designated as volatile organic compounds (VOCs).(2–4) VOCs are a concern because they give rise to the generation of photochemical oxidants and suspended particulate matter that damage humans and plants.[5]. VOCs have been reported to cause health problems such as carcinogenesis after longterm exposure; countermeasures are required.[6,7,8,9,10,11,12] If we can constantly monitor the types and concentrations of VOCs used in manufacturing processes and laboratories, we can maintain a safe work environment

  • The thicknesses of pp-CMS and pp-vinylbenzoic acid (VBA) films at radio frequency (RF) powers of 90 to 150 W are shown by closed circles and squares in Fig. 3, respectively

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Summary

Introduction

In industry and research facilities, many organic solvents are used in manufacturing processes and experiments.[1]. Polymer thin films that can detect VOCs were formed by plasma polymerization, and their gas adsorption characteristics and desorption were investigated using a quartz crystal microbalance (QCM).(13). The mass sensitivity of the ATcut 9 MHz of the QCM used in this study is about 1 (ng/cm Hz) In this manner, a very small amount of mass change can be measured, so it is used for research on film thickness in meters and chemical sensors.[15]. In this research, when performing plasma polymerization, the QCM was placed on the lower electrode to polymerize a liquid monomer or attached to the upper electrode with tape to coat the polymer films. The gas adsorption characteristics of each polymerized film are measured and evaluated from the frequency change of the QCM, which is caused by the minute mass change of the polymerized film.[17–22]

Materials and equipment
Plasma polymerization
Results and Discussion
Chemical structure analysis and surface morphology observation of pp films
Sample gas adsorption and RS analysis
Conclusions

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