Development of NMIJ CRM 5207-a tungsten dot-array for the image sharpness evaluation in scanning electron microscopy - structure evaluation and determination of dot-pitch.

Abstract

We have developed a new certified reference material (CRM) for image sharpness evaluation and magnification calibration for scanning electron microscopy (SEM). Designed to be suitable for the image sharpness evaluation by the derivative method, the CRM has nanoscale tungsten dot-array structure fabricated on silicon substrate, which gives steep contrast transition from the dot to the substrate in SEM image. The pitch of the dot-array was SI-traceably measured as a specified value with relative expanded uncertainty ($k=2$) of ~1.3%, which can be utilized for the magnification calibration of SEM. Since specimens, as one of the image formation parameters, easily affect image sharpness value, our CRM, as a 'pinned specimen', will play an important role to achieve robust and stable image sharpness measurement system.