Abstract
A computer-aided microanalyzer (CMA) developed as a new instrument for comprehensive state analysis of iron and steel samples is described with respect to its principle, apparatus, method and application in that order. The instrument irradiates a sample by an electron beam in vacuum and measures generated characteristic X-rays. After repeating this series of operations at each of over 104analysis spots, the CMA processes the measured values with a computer, and displays the images in order to analyze the macroscopic and microscopic segregations of elements in samples, 0.5×0.5 to 100×100mm in size. Besides these basic functions, it can also perform the comprehensive state analysis of samples, including the analysis of carbon equivalent (Ceq) and inclusions. It is expected to find effective use in applications other than the analysis of iron and steel samples.
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