Abstract
For precise thermal control in satellites under varying internal heat dissipation and thermal boundary condition, we propose a high-fill factor MEMS radiator enhanced by the near-field effect. We have successfully fabricated a prototype with parylene shared springs and achieved a fill factor of as high as 89%. It is found that at the ON state, the diaphragm temperature is increased from 58.0 °C to 106.4 °C, showing 144% enhancement in the radiation heat flux.
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