Abstract
Multilayer coatings are key optical components in the EUV, soft X-ray and X-ray range. At Institute of Precision Optical Engineering (IPOE), the development of multilayer optics has been impelled for their wide applications in X-ray laser, plasma diagnostics, astronomical observation and synchrotron radiation. The paper presents our recent results of periodic multilayers of Mo/Si, Cr/C, Cr/Sc, La/B4C, Mo/B4C, Si/C, Si/SiC, Mg/SiC Mo/Y and Ru/Y. To improve the reflectivity of Ru/Y multilayer mirrors, Mo layers were inserted between Ru and Y layer. The Mo barrier layers suppress intermixing between Ru and Y, thereby increasing the reflectivity of Ru/Y multilayer. We also discuss the application of Mo/Si, Mo/Y, Mo/B4C, La/B4C non-periodic multilayers in EUV broadband polarization measurement.
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