Abstract
Multilayer mirror is one of the most useful devices for slow neutron experiments. A multilayer with small d-spacing and supermirror with large-m is desirable to enlarge utilization efficiency for neutron scattering experiments. Recently we have installed an ion beam sputtering instrument to Research Reactor Institute, Kyoto University (KURRI). We have succeeded in fabricating m=6 NiC/Ti supermirrors using ion beam sputtering technique, and fabricated very small d-spacing multilayer which has maximum number of layers so far. In this report, we show the performance of these multilayers as neutron mirror and discuss its application.
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