Abstract
Rotating-polarizer-and-analyzer-ellipsometry was developed with a multichannel detector. In this system, the transmission axes of the polarizer and analyzer rotated in phase using a flexible shaft for mechanical connection. With this configuration, autocalibration for the azimuths of the polarizer and analyzer was achieved. Thus, experimental error related to the calibration could be avoided and spectroscopic ellipsometry with the simplest operation principle was realized. Data acquisition time for 512-point ellipsometry spectra was 3 s over the photon energy range of 1.5 to 4.5 eV.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.