Development of Miniature Camera Module Integrated With Solid Tunable Lens Driven by MEMS-Thermal Actuator

Abstract

The design, fabrication, assembly, and characterization of a miniature adjustable-focus camera module driven by MEMS-thermal actuators are presented. The camera module consists of one solid tunable lens for optical power variation, two identical MEMS-thermal actuators integrated with displacement amplifiers for lens element driving, a CMOS image sensor for recording, and necessary CNC fabricated components for supporting and housing. Fully 3D-multiphysics simulations with valid material properties are performed to explore the design and, hence, optimize the performance of the system. In this paper, the fabricated MEMS-devices are clearly demonstrated, and followed by the detailed characterization of the camera module. Static characterizations of the system, including the temperature distribution on actuators, electric resistance change with temperature increase, displacement-voltage curve of actuator, and the focal length tuning capability, are tested. Dynamic response speed and imaging performance of the camera module are also covered. Results show that the designed MEMS actuator is able to provide a maximum output displacement of 135 μm when a 10 V driving voltage is applied. Driven by the thermal actuator, the solid tunable lens presents a repeatable focal length tuning from 9.2 to 7.9 mm with precise focus control. The adjustable-focus capability of the miniature camera module is experimentally demonstrated by clearly focusing targets placed at different object distances.