Abstract
Development of microfabrication technologies for MEMS and MOEMS has been reviewed. Depending on the materials, the fabrication technologies are grouped into silicon and non-silicon processes. Inherited from semiconductor industry, silicon process technology is the dominant technology in manufacturing MEMS and MOEMS. Past and present progresses in silicon micromachining have been described. However, there is a growing trend for non-silicon materials in MEMS and MOEMS devices and systems. Variety of materials can be used, including metals, polymers, glass, ceramics, etc. They often offer better performance and low cost of manufacturing than silicon. Although in research community new microfabrication technologies are constantly being developed, the industry requires as few as possible processing technologies so that the complexity and cost of manufacturing can be greatly reduced. MEMS industry needs standardization so that it can prosper like the semiconductor industry. However, there are great hurdles in standardizing MEMS fabrication technology. The fragmented market and diversity of applications make the standardization much more difficult than the semiconductor industry. One formula of standardization is the establishment of foundries. It has been a magic formula for semiconductor industry, but has not been so magic to the MEMS industry.
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