Abstract
A micro lateral force sensor has been developed. The sensor equipped a traveling table supported by suspensions. The lateral motion of the traveling table was activated by comb actuator. The applied voltage to the comb actuator was controlled to keep the position of the traveling table constant by detecting tunnelling current at a gap between two electrodes that were arranged on the traveling table and the fixed plate, respectively. An AFM (atomic force microscope) was used to apply a lateral force on the traveling table of the sensor. When the probe of a cantilever was pressed against the traveling table and a raster scanning was conducted, the driving voltage of the comb actuator was changed to compensate the friction force between the probe and traveling table. The driving voltage was captured into an external channel of the AFM system and recorded during the scanning. Friction force image of asperity array was obtained from the driving voltage, which was as same as the image obtained from torsion of the cantilever. The force sensitivity of the lateral force sensor was comparable to sensitivity from torsion of the cantilever.
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