Abstract
Multi-vibrational-mode electrostatic energy harvesters are designed and micro-machined utilizing a simple silicon-on-insulator (SOI) wafer-based process. Enhanced adaptability to various vibrational environments is achieved in the proposed design by using serpentine springs attached to the fishbone-shaped inertial mass. The experimental results show that the developed device could convert an input vibration of 6 g at 1272 Hz to 2.96, 3.28, and 2.30 μW for different vibrational directions of 0°, 30°, and 45° with respect to a reference direction, respectively, when all serpentine springs are identical. An alternative device design using serpentine springs with different stiffnesses between x- and y-axes exhibited resonance frequencies at 1059 and 1635 Hz for an input vibrational direction of 45° and acceleration amplitude of 4 g, successfully generating 0.723 and 0.927 μW of electrical power at each resonance, respectively.
Highlights
The developments in micro/nanotechnology over the last few decades have promoted the birth of miniaturized devices with improved performance, most of which have replaced conventional macro-sized devices
We introduced multiple vibrational modes of an inertial mass for electrostatic energy harvesters that can convert multi-directional and multi-frequency vibrations to electric energy
The signal for The the input vibration is generated from a function generator and transferred theelectrical power amplifier
Summary
The developments in micro/nanotechnology over the last few decades have promoted the birth of miniaturized devices with improved performance, most of which have replaced conventional macro-sized devices. Conventional energy sources are usually large in volume and inevitably require periodic replacement, impeding further miniaturization and precluding quasi-permanent, independent operation of micro/nano-sized devices [1]. As an alternative to batteries, micro fuel cells have been proposed and have shown great performance in terms of miniaturization and the volume-to-power generation ratio. Because micro fuel cells still require a periodic supply of fuel [2], the realization of self-sustained micro/nano-sized devices still remains challenging. Among these energy sources, kinetic energy in the form of periodic vibration has received considerable attention, especially in micro-electromechanical systems (MEMS), for the use as a source of operation energy for self-sustained micro-sensors and communication nodes [4]
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
