Development of Mathematical Models of the Transformation Function of a Quasi-differential Pressure Sensor of Automation and Control Systems

Abstract

Capacitive sensors are used in products and systems in which stability, low power consumption and the ability to calibrate without removing it from the product are the main parameters. These areas and areas include the missile, aviation and nuclear industries. Low power consumption and the ability to manufacture capacitive sensors using thin-film technology, which sharply reduces their dimensions, is a promising direction for unmanned samples. Stable operation of capacitive thin-film sensors requires thorough preparation of working surfaces and proven technologies for applying composite coatings. It is very important when assembling and adjusting the absence of distortion and displacement of the topology on the moving and stationary electrodes of the sensors. This makes it possible to significantly reduce errors due to the influence of non-parallelism of the electrodes in the sensor. In addition, the developed designs and models allow significant movement of the movable electrode without increasing the measurement error. And this is important for capacitive sensors designed to measure low pressures.