Abstract
Integrating the SQUIDs and sensing coils of magnetic microcalorimeters onto the same die is a promising approach for maximizing flux coupling and signal/noise. However, new challenges in microfabrication must be overcome, because the underlying SQUID devices are sensitive to chemical attack and elevated processing temperatures. In this report, we describe development and details of a microfabrication process for integrated SQUID/sensor gamma-ray magnetic microcalorimeters with electroformed gold absorbers, starting from a modified version of the STAR Cryoelectronics “Delta 1000” Josephson Junction process.
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