Abstract
Artificial cilia actuated by an applied magnetic field have been developed. In our previous report, we demonstrated actuated cilia of a few millimeters scale, which were fabricated by cutting a magnetic elastomer sheet. The fabricated artificial cilia worked similarly to natural cilia; however, they had a much larger structure than natural ones, and showed difficulty for use in pumping systems in micro-total analysis systems (µTAS) fields. Thus, our goal is further miniaturization. In this study, we introduce a new process of fabricating smaller pillar structures with a magnetic orientation in each pillar by ultraviolet (UV) laser machining. We also give different orientations to groups of pillars by the alternate laser machining of the mold and casting processes.
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