Development of machining technology for micropatterns with large surface area

Abstract

With increasing demand for micropatterns such as V-shaped microgrooves and the trend of large surface areas in developing technologies, precision machining technology for micropatterns with large surface areas is expected to play an increasingly important role in today's manufacturing technology. In large-surface micromachining, machining time is much longer than that in general pattern machining and it is not easy to achieve uniform machining accuracy in the entire machined areas because of various factors. Therefore, systematic machining processes and technical development for achieving precision in each process are essential prerequisites to reduce the errors. In this study, we focused on developing machining technologies, which include a machine vision system for precise tool setting, an on-machine measurement system for large-area measurement, and software for tool path generation and simulation, for the fabrication of large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in., 675 × 450-mm mold with tens of V-and pyramid-shaped micropatterns.