Abstract
A low temperature ultrahigh vacuum atomic force microscope (UHV-AFM) has been developed, which allows the sample to be cooled from room temperature to lower than 28 K during observation and can be attached to the conventional UHV-AFM. Atom resolved non-contact atomic force microscopy (NC-AFM) images of the Si(100) surface were obtained at 120 K and 50 K using the produced low temperature UHV-AFM/STM, and the Si(100) dimer structure was successfully observed for the first time by NC-AFM. It was found that the Si(100)-c(4×2) structure mainly covered the area at 120 K, but the p(2×2) structure area increased at 50 K.
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