Development of low power 13.56 MHz plasma source family

Abstract

Summary form only given, as follows. The paper represents the results of the authors many years of work in the field of low power RF plasma source development on the basis of the theoretical consideration of plasma wave excitation and absorption in a limited magnetoactive plasma, numerical simulation of an RF discharge located in the external magnetic field, experimental investigation of the RF power absorption by an inductive discharge at different values of external magnetic field and design and tests of RF ion sources and plasma reactors.