Abstract
Based on coaxial impact-collision ion scattering spectroscopy (CAICISS) operable in a gas phase atmosphere, we have developed a low energy neutral atom scattering spectroscopy, in which a neutral He beam is used as a probe, to avoid the charging effects of insulator surfaces. In this technique, He gas is introduced into a charge exchange cell set in a sample chamber, and under He gas atmosphere He + ions are neutralized just before impinging on the sample. The conversion efficiency of He + to He 0 was estimated to be about 40%. In order to demonstrate the performance of the technique, we successfully characterized MgO film deposited on fused silica, without the charging effects of insulator surfaces.
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