Abstract
The development of a poly(vinyldifluoride) (PVdF)-based dynamic pressure sensor for low-pressure application is reported. β-phase PVdF film of thickness 10 µm is fabricated using the spin coating method with thermally evaporated Al electrodes (200 nm) on both sides of the film. The film is polled and packaged in a poly(dimethyl siloxane) block. The exposed area of the pressure sensor is ∼500 µm in diameter. A signal conditioning circuit is designed to amplify the signal and a NI DAQ card with LabVIEW software is used to acquire the signal on a PC. The dynamic pressure response of the sensor is recorded which shows linearity in detection. Pressure measured by the sensor is in the range of 10–150 kPa.
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