Abstract
We have proposed a method for reproducing an accurate solution of low-density ablation plasma by properly treating anisotropic radiation. Monte-Carlo method is employed for estimating Eddington tensor with limited number of photon samples in each fluid time step. Radiation field from ablation plasma is significantly affected by the anisotropic Eddington tensor. Electron temperature around the ablation surface changes with the radiation field and is responsible for the observed emission. An accurate prediction of the light emission from the laser ablation plasma requires a careful estimation of the anisotropic radiation field.
Highlights
High-temperature plasma ablated from laser-irradiated target is feasible for a source of extreme ultraviolet (EUV) light which is expected to be used in photolithography technology for the generation of semiconductor devices
We have proposed a method for reproducing an accurate solution of low-density ablation plasma by properly treating anisotropic radiation
Radiation field from ablation plasma is significantly affected by the anisotropic Eddington tensor
Summary
High-temperature plasma ablated from laser-irradiated target is feasible for a source of extreme ultraviolet (EUV) light which is expected to be used in photolithography technology for the generation of semiconductor devices. We focus on the accurate prediction of the emission from laser ablation plasma using our radiation hydrodynamics code and discuss about the importance of anisotropic treatment of radiation transfer through comparison between the conventional method and the proposed one. We present the effect of the anisotropic radiation field on the dynamics of the ablation plasma and the resultant EUV emission through radiation hydrodynamics simulations coupling with new closure model by use of Monte-Carlo method.
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