Development of Large Optics Fabrication/Finishing (LOF) Process(Nanoprecision Elid-grinding (continued))

Abstract

The ELID-grinding R&D activities on development of large optics for astronomical observatory and semiconductor fabrication, have been accelerated in these years. The authors developed the large aspheric nanoprecision ELID-grinders such as "L-uaoe-GIC", "N-aou-VEL", etc. for those purposes. In this paper, the authors introduce the examples of ELID-ground large mirrors and the new turning grinding method with the exclusive large and indexable rotary table which was newly developed specifically for efficient fabrication of large telescope mirror segments. The developed rotary table was successfully mounted on a large aspheric ELID-grinder. A new additional finishing process method was also devised on the machine.