Development of in-lab energy-filtered X-ray photoemission electron microscope using air-core-coil-type multipole Wien filter

Abstract

We have developed an in-lab energy-filtered X-ray photoemission electron microscopy (EXPEEM) combining a high-brilliance X-ray source and a new Wien filter-type energy analyzer, which can accept photoelectrons in a wide angle. To obtain high energy resolution, we enlarged the inner diameter of the filter and reduced aberrations of an analyzer using multipole electrodes and air-core coils. We obtained an energy-filtered image of photoelectrons.