Development of High-sensitive Gas-sensor for B2H6 using Gas-permeable Conductive DLC Membrane

Abstract

The gas-permeable DLC membrane was fabricated by nitrogen-doped DLC coating on the surface of the porous membrane. The application of conductive DLC membrane for the selective gas sensor was examined. The DLC sensor could selectively detect B2H6 among four toxic gases (PH3, AsH3, B2H6, SiH4) that were commonly used in the factory of the semiconductor materials. The response currents for B2H6 show the linear relation between 0.05 ppm to 0.5ppm of B2H6, and the low detection limit for the B2H6 detection was found to be 0.025 ppm at S/N = 3. The response speed of the DLC gas sensor was quite high. Therefore, it can be concluded that the gas-permeable N-doped DLC membrane is the promising electrode materials that can realize the selective B2H6 gas sensor.