Development of high-resolution full-field x-ray microscope based on multilayer advanced Kirkpatrick-Baez mirrors (Conference Presentation)

Abstract

Spatial resolution of full-field X-ray microscopes based on total-reflection mirrors was limited by grazing-incidence angle of the mirrors. At practical conditions, achievable spatial resolution is approximately 30 nm. To overcome the limitation, multilayer advanced Kirkpatrick-Baez mirrors and full-field X-ray microscopes with this objective mirrors have been developed in Osaka University and RIGAKU Corp. One of the remarkable points in this design is an achievable spatial resolution of less than 20 nm owing to large grazing-incidence angle and multilayer (Pt/C) with narrow period. Also, the advanced Kirkpatrick-Baez mirrors comprise two mirror pairs based on the Wolter type I and type III optics, respectively, to have sufficiently large magnification even at a compact setup with the whole length of 2 m (between a sample and a camera). The compactness makes it possible to apply the optics to laboratory-based X-ray microscopes, which is another ongoing project. A performance test using a Siemens star chart at an X-ray energy of 8 keV was performed in SPring-8 BL29XUL. The results showed lines with approximately 30-nm width could be resolved. Also, tests of stability and energy dependence confirmed usability of this system.