Abstract
An x-ray radiography system (XRS) equipped with a multiwalled carbon nanotube cathode was developed. This system has ordinary scanning electron microscopy (SEM) functions available for the precise adjustment of focusing conditions including astigmatism and alignment of an electron beam. The electron beam diameter on a target, which is one factor that limits spatial resolution of XRS, was estimated as 50nm from the resolution of SEM images obtained. X-ray images were taken as a demonstration of the XRS, and clear images with resolution higher than 700nm were successfully obtained.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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