Abstract
MI sensor is a magnetic sensor based on the Magneto Impedance (MI) effect discovered by Mori et al. in 1993[1]. A small and highly sensitive magnetic sensor (AMI 306) based on above MI effect and used as an electromagnetic compass mainly in mobile phones and smart phones has been developed and commercialized by AICHI MICRO INTELLIGENT[2]. According to theoretical analysis, the MI sensor is foreseen to show the fT/√Hz level of noise density[3], and its performance would even be equal to SQUID. MI element (AMI306) with pickup coil fabricated by a plating process is used in electromagnetic compasses. Although it shows magnetic resolution in the micro Tesla order[4], higher performance in sensitivity and noise level is required.
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