Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor

Abstract

With recent development in advanced manufacturing, demand for nanometric accuracy in dimensional metrology has increased dramatically. To satisfy these requirements, we propose a high-accuracy micro-roundness measuring machine (micro-RMM) using a multi-beam angle sensor (MBAS). The micro-RMM includes three main parts: the MBAS, a rotary unit, and a bearing system. The MBAS has been designed and established in order to improve motion accuracy of the micro-RMM. The dimensions of the MBAS are 125(L)mm×130(W)mm×90(H)mm. Compared with other methods, an MBAS is less susceptible to spindle error (stage-independence) when detecting angles, can maintain high sensitivity with miniaturized size, and can be used conveniently at the factory level. The optical probe, reported in this paper, is based on the principle of an autocollimator, and the stability is improved when using the MBAS. Unlike multi-probe methods, the micro-RMM is constructed to realize roundness measurement by using only one probe, which is less susceptible to instrumental errors. Experimental results confirming the feasibility of the multi-beam angle sensor for roundness measurement are also presented.